Optoseven focuses on customised measurement systems and demanding trace gas analysis including gases that are challenging to measure, like ammonia, hydrogen fluoride, hydrogen chloride, formaldehyde or mercury. Optoseven offers a single instrument for detection of multiple compounds at even trace-level concentrations which is very difficult or even impossible with more traditional optical measurement systems.
The Optoseven trace gas analyser technology employs cutting-edge optical technology and advanced laser light sources. In addition to the remarkable response time and sensitivity, the measurement platform excels in the flexibility of combining detection of different gases within a single analyser unit.
Clean room AMC (Semiconductor industry)
Airborne Molecular Contamination (AMC) is chemical contamination in the form of vapors or aerosols which have a detrimental effect on a product or a process. The main sources for AMC are the building and cleanroom construction materials, general environment, process chemicals and operating personnel. Monitoring of the AMC is important, especially in industries where AMC can directly affect the product or process, e.g., at semiconductor industry.
Monitoring of AMC has become a crucial element of routine cleanroom management as the feature size of semiconductor devices has gone deep into sub-100-nm range. One of the most vexing AMCs plaguing cleanroom of the semiconductor industry is ammonia. As ammonia is a base, it neutralises the acidic property of the photoresist, resulting in “T-topping” and wafer image defects. On the other hand, acids as contaminants can deposit on the wafer surface by means of adsorption. Hydrogen fluoride and hydrogen chloride have a strong affinity for deposition on aluminium and copper layers. Acids can furthermore cause corrosion of metal lines, which readily occurs at acid concentrations of a few ppb in the atmosphere. Ammonia, hydrogen chloride and hydrogen fluoride are always present at some concentrations in semiconductor manufacturing cleanroom because they are used in the etching process.
With Optoseven’s trace gas analyser it is possible to monitor AMC levels in your clean room and maintain the high quality of your product.